METAPHOR, SKEPTICISM, UNDERSTANDING METAPHOR, SKEPTICISM, UNDERSTANDING




Adaptive soft sensor considering process state in film manufacturing process and identification of critical process variables

In the film manufacturing process, process variables, such as temperature and pressure, are measured and controlled to manage the film properties, such as thickness and optical characteristics.Each film property is regulated by the product specifications, and having all film properties adhere to the specifications is important.In this study, soft s

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